Vacuum gauges for vapor deposition (CVD / PVD) and optical coating

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Smartline vacuum gauges, display and control instruments  

VSP Pirani Vacuum Gauge 

• Reliable Pirani vacuum transducer
• Excellent reproducibility, stable and accurate measurements due to optimized temperature compensation
• Vacuum transducer with wide measuring range 1000-1e-4 mbar, high resolution and accuracy
• Precise push button adjustment of vacuum gauges
• Logarithmic standard output, easy system integration and connection with PLC

VSM vacuum gauge, combination sensor Pirani / Cold cathode

• Robust vacuum transducer with patented pulsed Pirani sensor with extended range which allows operation of the cold cathode at lower pressure and increase of lifetime
• Logarithmic signal output 0 – 10 V and RS485 interface
• Vacuum transducer with replaceable sensor head
• Correct pressure readings by means of separate gas type correction factors for Pirani sensors and cold cathode sensors

VSH vacuum gauge, combination sensor Pirani / Hot cathode (Bayard-Alpert)

• Vacuum transducer with patented pulsed Pirani sensor with extended range allows operation of the hot cathode at lower pressure and increase of lifetime
• Logarithmic signal output 0 – 10 V, digital RS 485 interface and EtherCat
• Vacuum transducer with replaceable sensor heads, without electronics bakeable up to 180 °C
• Correct pressure readings by means of separate gas type correction factors for Pirani and hot cathode sensors
• Vacuum gauge Bayard-Alpert with double filament, in the event of filament failure the gauge automatically switches to the backup, insensitive against inrush of air

Suitable Display and control units:

• VD12 – 2 Channel vacuum display and control unit
• VD14 – 4 Channel vacuum display and control unit

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These vacuum gauges are suitable for the following applications:

• Vacuum transducer for thin film deposition
• Flat panel display coating
• Photovoltaic and glass coating
• Vacuum transducers for corrosive gases
• Vacuum gauge for chemical vapor deposition (CVD)
• Vacuum gauge for physical vapor deposition (PVD)
• Vacuum Transducers for the semiconductor industry

For control and measuring tasks like leakage tests we recommend our VD8 handheld vacuum gauge with data logging functionality.

Calculation of leakage is made possible by measuring and storage of the pressure increase and by the use of the VGR VacuGraph software.

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Thyracont – The Vacuum Gauge Made In Germany