VACUUM GAUGE FOR DRY ETCHING
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VSP – Pirani vacuum gauge for dry etching
- “pulsed Pirani” sensor, patented by Thyracont
- Highly reliable & durable Pirani vacuum transducer
- Accurate measurements as a result of optimized temperature compensation
- High reproducibility of the measurements
- Vacuum transducer with a wide measuring range 1000-1e-4 mbar, high resolution & accuracy
- “push button adjustment”, precise and easy
- Log. standard output, very easy integration into existing systems and connection with PLCs
- This vacuum gauge is suitable for the following applications:
- Vacuum gauge for corrosive gases
- Dry etching
- Plasma surfacing
Capacitive vacuum transmitter for corrosive gases VCC 200
- Capacitive vacuum transmitter, very durable
- Vacuum gauge with aluminium-oxide ceramic sensor, corrosion resistant
- Gas-type independent measurements are possible
- A measuring range of 200- 0.1 mbarThis capacitive vacuum gauge is suited for applications like:
- Corrosive gases
- Laboratory instruments
- Distillation controller
- Vacuum gauge for rotary evaporators
For your control and measuring tasks e. g. leakage tests we recommend our VD8 compact vacuum meters.
Leakage calculation is possible by measuring and storage of the pressure increase and using our VGR VacuGraph software
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